|
Integrated Physical Vapor Deposition and Glovebox (Lesker Nano36)
|
|
Parylene Chemical Vapor Deposition (SCS Labcoater 3)
|
|
Reactive Ion Etching (Glow Research)
|
|
Sputter & Plasma Etcher (Denton Vacuum Desk II Sputter Coater)
|
|
Fumehood (Air Sentry V3)
|
|
Semiconductor parameter analyzer (HP 4155A)
|
|
Semiconductor parameter analyzer (HP 4156A)
|
|
Probe station (Everbeing)
|
|
RLC meter (NF ZM 2372)
|
|
Microscope (Nikon Eclipse LV100ND)
|
|
Oscilloscope (Keysight DSOX2004A)
|
| Spin coater (Ni-Lo 4) |
| Hot plate (Corning) |
| Laboratory scale (VWR) |
| Ultrasonic cleaner (VWR) |
| Cyclic voltammeter (CH Instruments 1200C) |
| Desiccator box (Plas-Labs) |
|
3D printer (MakerBot Replicator 2)
|
|
Microfluidics station (custom)
|